Scanning probe microscope

Details Scanning probe microscope Scanning probe microscope

1993-12-28

1995-08-08

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

H01J 3700

Patent

active

054401216

ABSTRACT:
A scanning probe microscope uses a conductive material as a probe of AFM. The probe scans a sample while the probe is forcibly oscillated by applying alternating current voltage from an oscillator between the probe and the sample. Signals .omega. and 2.omega. from the probe are extracted with an analog processor using a discrete Fourier transformation, so that distribution of surface potential of the sample is obtained using the signals .omega. and 2.omega..

REFERENCES:
patent: 5168159 (1992-12-01), Yagi
patent: 5185572 (1993-02-01), Yagi et al.
patent: 5237859 (1993-08-01), Elings et al.
patent: 5267471 (1993-12-01), Abraham et al.
patent: 5291775 (1994-03-01), Gamble et al.

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