Phenolic novolak resin compositions containing 5-indanol and the

Details Phenolic novolak resin compositions containing 5-indanol and the Phenolic novolak resin compositions containing 5-indanol and the

1994-02-09

1994-08-16

Bowers, Jr., Charles L.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Forming nonplanar surface

430165, 430191, 430192, 430193, G03F 730, G03F 7023

Patent

active

053386531

ABSTRACT:
A phenolic novolak resin composition comprising a condensation product of at least one aldehyde source with a phenolic source comprising 5-indanol. Said phenolic novolak resins are used in radiation-sensitive compositions, especially those useful as positive-working photoresists.

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