Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Patent
1993-10-18
1994-05-17
Bowers, Jr., Charles L.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Forming nonplanar surface
430165, 430330, 430331, G03F 730, G03F 738
Patent
active
053127200
ABSTRACT:
A radiation sensitive mixture comprising an alkali-soluble binder resin and at least one photoactive compound comprising a compound of formula (I): ##STR1## wherein each R is individually selected from hydrogen and a lower alkyl group having 1 to 4 carbon atoms; n is either 0, 1, or 2; and D is selected from the group consisting of hydrogen or o-naphthoquinone diazide sulfonyl group; with the proviso that at least two D's are o-naphthoquinone diazide sulfonyl groups, and wherein the amount of said binder resin is about 70 to 95% by weight and the amount of photoactive compound being from about 5 to about 30% be weight, based on the total solids content of said content of said raditional-sensitive mixture.
REFERENCES:
patent: 5010163 (1991-04-01), Sorini et al.
patent: 5112719 (1992-05-01), Yamada et al.
Jeffries, III Alfred T.
Toukhy Medhat A.
Bowers Jr. Charles L.
OCG Microelectronic Materials Inc.
Simons William A.
Young Christopher G.
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