Substrate holding device and exposing apparatus using the same

Details Substrate holding device and exposing apparatus using the same Substrate holding device and exposing apparatus using the same

1995-06-05

1999-03-16

Porta, David P.

X-ray or gamma ray systems or devices

Specific application

Lithography

378208, 269 21, 279 3, 25044211, H01J 3720

Patent

active

058839321

ABSTRACT:
A substrate holding apparatus in which first and second vacuum clamping devices each have a holding surface for holding a portion of a substrate, a first driving device for rotating the first vacuum clamping device relative to the second vacuum clamping device, and a second driving device for reciprocally moving the first vacuum clamping device between a position in which it protrudes by a predetermined amount from the holding surface of the second vacuum clamping device and a position in which it does not protrude from that holding surface. Also disclosed is a substrate holding device in which a vacuum clamping device creates a vacuum clamp force on the holding surface thereof, a cylindrical delivering member surrounds at least a portion of the holding surface and is reciprocally movable between a position in which it protrudes by a predetermined amount from the holding surface and a position in which it does not protrude from the holding surface, and a driving device for moving the delivering member.

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patent: 5253012 (1993-10-01), Chiba et al.
patent: 5374829 (1994-12-01), Sakamoto et al.

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