Profile imaging techniques

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage

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Details

356398, 358106, G01B 1100

Patent

active

046132341

ABSTRACT:
A method and apparatus of measurement and/or dimensional comparison. The method utilizes the steps of locating an object on a prescribed first plane with reference to a datum position, illuminating the object with a thin fan-shaped beam of light in a second plane substantially perpendicular to the prescribed first plane along a sufficiently narrow strip to produce a thin light trace, scanning the object in a third plane angularly displaced from said second plane by means of a video camera adjusted, focussed and positioned so as to discriminate the illuminated strip from the background and the remainder of the object, comparing the amplitude of the video signal at a series of positions along the scan with a corresponding series of values representing the desired amplitudes at those positions along the scan in order to derive error indications, linearly displacing the object a prescribed distance in the first plane in a direction which includes a component normal to the line produced by the intersection of said second and third planes, repeating the second and fourth steps, and repeating the fifth step until the entire volume of interest has been scanned at a plurality of intervals. An apparatus to accomplish the method is also provided.

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