Semiconductor memory device and method of forming transistors in

Details Semiconductor memory device and method of forming transistors in Semiconductor memory device and method of forming transistors in

1997-01-21

2000-03-21

Tsai, Jey

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

438382, H01L 218244

Patent

active

060402091

ABSTRACT:
A method of forming a transistor in a peripheral circuit of a random access memory device wherein a transistor gate, capacitor electrode or other component in the memory cell array is formed simultaneously with the formation of a transistor gate in the periphery.

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patent: 5356826 (1994-10-01), Natsume
patent: 5500387 (1996-03-01), Tung et al.

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