Carrier head with a flexible membrane for a chemical mechanical

Details Carrier head with a flexible membrane for a chemical mechanical Carrier head with a flexible membrane for a chemical mechanical

1997-07-11

1999-10-12

Scherbel, David A.

Abrading

Machine

Rotary tool

451 41, 451285, 451286, B24B 500, B24B 2900

Patent

active

059646535

ABSTRACT:
A carrier head with a flexible member connected to a base to define a first chamber, a second chamber and a third chamber. A lower surface of the flexible member provides a substrate receiving surface with an inner portion associated with the first chamber, a substantially annular middle portion surrounding the inner portion and associated with the second chamber, and a substantially annular outer portion surrounding the middle portion and associated with the third chamber. The width of the outer portion may be significantly less than the width of the middle portion. The carrier head may also include a flange connected to a drive shaft and a gimbal pivotally connecting the flange to the base.

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