Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
Patent
1995-06-06
1997-07-29
Gonzalez, Frank
Optics: measuring and testing
By configuration comparison
With comparison to master, desired shape, or reference voltage
356237, 356239, G01B 1100
Patent
active
056526571
ABSTRACT:
An inspection system inspecting an original with a pellicle, which system includes a light source for providing a light beam, a first detecting device for receiving light produced as a result of passage of the light beam through the pellicle, a second detecting device for receiving light produced as a result of non-passage of the light beam through the pellicle, and a processing system for determining information related to transmissivity of the pellicle, on the basis of outputs of the first and second detecting devices.
REFERENCES:
patent: 3734626 (1973-05-01), Roberts et al.
patent: 4795911 (1989-01-01), Kohno et al.
patent: 4831274 (1989-05-01), Kohno et al.
patent: 4866287 (1989-09-01), Weber
patent: 4886975 (1989-12-01), Murakami et al.
patent: 4999511 (1991-03-01), Kohno
patent: 5017798 (1991-05-01), Murakami et al.
patent: 5098191 (1992-03-01), Noguchi et al.
patent: 5106194 (1992-04-01), Kuchel
patent: 5148037 (1992-09-01), Suda et al.
patent: 5168322 (1992-12-01), Clarke et al.
patent: 5200800 (1993-04-01), Suda et al.
patent: 5270794 (1993-12-01), Tsuji et al.
patent: 5291023 (1994-03-01), Hasegawa et al.
patent: 5333050 (1994-07-01), Nose et al.
patent: 5344236 (1994-09-01), Fishman
Kohno Michio
Miura Seiya
Miyazaki Kyoichi
Takeuchi Seiji
Tsuji Toshihiko
Canon Kabushiki Kaisha
Gonzalez Frank
Ratliff Reginald A.
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