Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making named article
Patent
1988-08-08
1990-05-15
Dees, Jose G.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making named article
430 5, 430 22, 430323, 430935, G03C 516
Patent
active
049257765
ABSTRACT:
A method for manufacturing an optical memory element including the steps of disposing a resist film on a substrate, placing a photo-mask carrying a guide groove pattern on the resist film so as to position the photo-mask over a predetermined position of the substrate, forming a guide groove pattern latent image on the resist film, developing the guide groove pattern latent image formed on the resist film, conducting an etching operation through the developed guide groove pattern as to form guide grooves in the substrate, removing the resist film from the substrate, and disposing a recording medium layer on the substrate having the guide grooves formed therein.
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Deguchi Toshihisa
Hirokane Junji
Inui Tetsuya
Katoh Shohichi
Ohta Kenji
Dees Jos,e G.
Sharp Kabushiki Kaisha
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