Radiant energy – Inspection of solids or liquids by charged particles
Patent
1992-01-14
1994-03-22
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
250307, H01J 3700
Patent
active
052967042
ABSTRACT:
A scanning tunneling microscope has an STM unit including a probe for scanning the surface of an object. The STM unit has at its outer peripheral surface a cylindrical enclosing member extending towards an object table. When the object is observed, the object table is elevated or the STM unit is lowered, so that the enclosing member is urged upon the table. The table and the STM unit constitute one body. As a result, relative movement between the object and the probe can be prevented, and also influence due to vibration can be prevented. In addition, the enclosing member isolates the object and the probe from the outside space, whereby electric noise, magnetic noise, sound noise and air flow are shielded. Thus, the influence due to external vibration can be reduced, and the stability is enhanced.
REFERENCES:
patent: 4343993 (1982-08-01), Binnig et al.
patent: 4762996 (1988-08-01), Binning et al.
patent: 4841148 (1989-06-01), Lyding
patent: 4914293 (1990-04-01), Hayashi
patent: 4992728 (1991-02-01), McCord et al.
patent: 4999495 (1991-03-01), Miyata et al.
patent: 5041783 (1991-08-01), Ohta et al.
patent: 5083022 (1992-01-01), Miyamoto et al.
Review of Scientific Instruments, vol. 59, No. 7, Jul. 1988 pp. 1035-1038, American Institute of Physics, Compact, High-Stability, "Thimble-Size" Scanning Tunneling Microscope.
IBM Technical Disclosure Bulletin, vol. 31, No. 9, Feb. 1989, p. 216, Tip Revolver for Scanning Tunneling Microscope.
Journal of Vacuum Science & Technology, Part A, vol. 6, No. 2, Mar./Apr. 1988, American Vacuum Society, New York, Design of Scanning Tunneling Microscope for Biological Applications.
Rev. Sci. Instrum. 57 (3), Mar. 1986, pp. 441-445.
Mishima Shuzo
Miyamoto Hirofumi
Okada Takao
Ota Hiroko
Takase Tsugiko
Anderson Bruce C.
Olympus Optical Co,. Ltd.
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