Spatial light modulator with multi-layer landing structures

Details Spatial light modulator with multi-layer landing structures Spatial light modulator with multi-layer landing structures

2008-03-26

2011-11-29

Ahmed, Shamim (Department: 1713)

Etching a substrate: processes

Etching of semiconductor material to produce an article...

C216S013000, C216S024000, C216S041000, C216S067000

Reexamination Certificate

active

08066890

ABSTRACT:
A method of fabricating a spatial light modulator. The method includes providing a first substrate including a first bonding surface, forming a first layer coupled to the bonding surface, wherein the first layer is characterized by a first set of material parameters, and forming a second layer coupled to the first layer, wherein the second layer is characterized by a second set of material parameters. The method also includes patterning the first layer and the second layer to form a plurality of landing structures extending to a first distance from the bonding surface of the first substrate. The method further includes providing a second substrate including a second bonding surface, joining the first bonding surface of the first substrate to the second bonding surface of the second substrate, and forming a plurality of moveable mirrors from the second substrate. During operation, the moveable mirrors make contact with the second layer.

REFERENCES:
patent: 5447600 (1995-09-01), Webb
patent: 5793519 (1998-08-01), Furlani et al.
patent: 5885468 (1999-03-01), Kozlowski
patent: 5939171 (1999-08-01), Biebl
patent: 6127756 (2000-10-01), Iwaki et al.
patent: 6285490 (2001-09-01), Meier et al.
patent: 6489241 (2002-12-01), Thilderkvist et al.
patent: 6642913 (2003-11-01), Kimura et al.
patent: 6820988 (2004-11-01), van Drieenhuizen
patent: 6827866 (2004-12-01), Novotny
patent: 6856068 (2005-02-01), Miller et al.
patent: 6891654 (2005-05-01), Kurosawa et al.
patent: 6891655 (2005-05-01), Grebinski et al.
patent: 7022245 (2006-04-01), Pan et al.
patent: 7026695 (2006-04-01), Yang et al.
patent: 7118234 (2006-10-01), Pan et al.
patent: 7167298 (2007-01-01), Pan
patent: 7172921 (2007-02-01), Yang et al.
patent: 7202989 (2007-04-01), Yang
patent: 2003/0161027 (2003-08-01), Kurosawa et al.
patent: 2003/0207487 (2003-11-01), Kubena et al.
patent: 2004/0000696 (2004-01-01), Ma et al.
patent: 2004/0240033 (2004-12-01), Pan et al.

Affiliated with

Also associated with

Rating

Spatial light modulator with multi-layer landing structures does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Spatial light modulator with multi-layer landing structures, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Spatial light modulator with multi-layer landing structures will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4310145