Method of fabricating a heated substrate support

Details Method of fabricating a heated substrate support Method of fabricating a heated substrate support

2008-07-23

2011-11-29

Phan, Thiem (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S509000, C029S515000, C029S850000, C029S868000

Reexamination Certificate

active

08065789

ABSTRACT:
A method of forming a substrate support comprises providing a body having a groove, inserting a heater element into the groove, disposing an insert into the groove, and inserting a cap into the groove. The heater element comprises a resistive element inside a sheath encased in a malleable cladding. The insert is disposed over the cladding, and the cap is substantially flush with an outer surface of the body.

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Office Action dated Jul. 17, 2007 from Taiwanese Patent Office on Application No. 94128097.

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