CMP head

Details CMP head CMP head

2007-05-24

2010-06-08

Eley, Timothy V (Department: 3724)

Abrading

Work holder

Work rotating

C451S397000, C451S285000

Reexamination Certificate

active

07731572

ABSTRACT:
A CMP head includes a membrane support and a membrane. The membrane support is disk-shaped, having an origin and a radius R. The membrane support has at least a ventilator disposed in a central region within the range between origin and (⅔) R, and at least a diversion opening disposed in a peripheral region within the range between (⅔) R and R. The membrane includes a disk-shaped part disposed on the first surface of the membrane support, and an annular part surrounding the annular sidewall of the membrane support.

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