4. Data processing: generic control systems or specific application
  5. Specific application, apparatus or process
  6. Product assembly or manufacturing

Yu-Fang Chien

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CMP head

Abrading – Work holder – Work rotating
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Conductive structure having capacitor

Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor
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Fluid-confining apparatus

Chemistry: electrical and wave energy – Apparatus – Electrolytic
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Method of controlling statuses of wafers

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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Profile ID: LFUS-PAI-P-2232334

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