Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate
2010-07-23
2010-12-28
Warren, Matthew E (Department: 2815)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
C438S584000, C438S585000, C438S589000, C257SE21050, C257SE21051, C257S331000
Reexamination Certificate
active
07858461
ABSTRACT:
A semiconductor device includes a transistor having a recessed gate, contact plugs formed in a region of a plurality of trenches, which are formed by recessing a semiconductor substrate. Further, a metal line and a source/drain region can be connected through the contact plug, so that on-current can be increased as much as an increased channel area.
REFERENCES:
patent: 2006/0270153 (2006-11-01), Lee
patent: 2006/0286728 (2006-12-01), Kim
patent: 1794467 (2006-06-01), None
patent: 200610054950.8 (2007-01-01), None
patent: 1020050045715 (2005-05-01), None
Chinese Office Action for application No. 200810089862.0, citing the attached reference(s).
Chinese Patent Gazette for application No. 200810089862.0, citing the above reference(s).
Hynix / Semiconductor Inc.
Lin John
Lowe Hauptman & Ham & Berner, LLP
Warren Matthew E
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