Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2007-07-12
2010-02-09
Phan, Thiem (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S831000, C029S846000, C029S874000, C029S876000, C335S078000, C335S262000, C438S024000, C438S050000, C438S080000
Reexamination Certificate
active
07657995
ABSTRACT:
A method of fabricating a MEMS switch that is fully integratable in a semiconductor fabrication line. The method consists of forming two posts, each end thereof terminating in a cap; a rigid movable conductive plate having a surface terminating in a ring in each of two opposing edges, the rings being loosely connected to guiding posts; forming upper and lower electrode pairs and upper and lower interconnect wiring lines connected and disconnected by the rigid movable conductive plate. The conductive plate moves up, shorting two upper interconnect wirings lines. Conversely, the conductive plate moves down when the voltage is applied to the lower electrode pair, while the upper electrode pair is grounded, shorting the two lower interconnect wiring lines and opening the upper wiring lines.
REFERENCES:
patent: 6143997 (2000-11-01), Feng et al.
patent: 6399406 (2002-06-01), Chan et al.
patent: 6426687 (2002-07-01), Osborn
patent: 6452124 (2002-09-01), York et al.
patent: 6504118 (2003-01-01), Hyman et al.
patent: 6777629 (2004-08-01), Lane et al.
patent: 6841839 (2005-01-01), Sridhar et al.
patent: 7373717 (2008-05-01), Lee et al.
Clevenger Lawrence
Dalton Timothy
Hsu Louis
Radens Carl
Wong Kwong Hon
International Business Machines - Corporation
Phan Thiem
Schnurmann H. Daniel
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