4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Lawrence Clevenger

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Bilayered metal hardmasks for use in Dual Damascene etch...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask resist contains inorganic material
Reexamination Certificate

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Bilayered metal hardmasks for use in dual damascene etch...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Compact SRAM cell incorporating refractory...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Compact SRAM cell incorporating refractory...

Active solid-state devices (e.g. – transistors – solid-state diode – Fet configuration adapted for use as static memory cell – With passive components
Reexamination Certificate

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High dielectric constant materials

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Profile ID: LFUS-PAI-P-2063794

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