Nonvolatile memory transistor having poly-silicon fin,...

Details Nonvolatile memory transistor having poly-silicon fin,... Nonvolatile memory transistor having poly-silicon fin,...

2008-01-04

2010-11-30

Tran, Thien F (Department: 2895)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S319000, C257S321000, C257S324000

Reexamination Certificate

active

07842994

ABSTRACT:
A nonvolatile memory transistor having a poly-silicon fin, a stacked nonvolatile memory device having the transistor, a method of fabricating the transistor, and a method of fabricating the device are provided. The device may include an active fin protruding upward from a semiconductor substrate. At least one first charge storing pattern on a top surface and sidewalls of the active fin may be formed. At least one first control gate line on a top surface of the at least one first charge storing pattern may be formed. The at least one first control gate line may intersect over the active fin. An interlayer dielectric layer may be formed on the at least one first control gate line. A poly-silicon fin may be formed on the interlayer dielectric layer. At least one second charge storing pattern on a top surface and sidewalls of the poly-silicon fin may be formed. At least one second control gate line on a top surface of the at least one second charge storing pattern may be formed, and the at least one second control gate line may intersect over the poly-silicon fin.

REFERENCES:
patent: 5496756 (1996-03-01), Sharma et al.
patent: 2008/0237684 (2008-10-01), Specht et al.

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