Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
Reexamination Certificate
2004-03-18
2010-10-19
Alejandro, Luz L. (Department: 1716)
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
Having glow discharge electrode gas energizing means
C118S7230ER
Reexamination Certificate
active
07815767
ABSTRACT:
A plasma processing apparatus of the present invention can reduce a manufacturing cost of the apparatus and a footprint by decreasing a load applied to a device for varying a distance between electrodes in comparison with a conventional apparatus and, at the same time, easily meet a scaling up of a substrate to be processed. A lower electrode and an upper electrode are installed inside a vacuum chamber. Provided at a lower electrode supporting member are openings for operating the upper electrode by using a driving mechanism installed outside the vacuum chamber. An intermediate ring is installed at bellows for air-tightly sealing the openings. Further, the intermediate ring is connected to a connecting member connected to an upper electrode supporting member and the driving mechanism.
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Alejandro Luz L.
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Tokyo Electron Limited
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