Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2007-02-14
2010-11-02
Souw, Bernard E (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C250S492200, C250S493100, C250S505100, C250S515100, C250S50400H
Reexamination Certificate
active
07825390
ABSTRACT:
An apparatus for forming a beam of electromagnetic radiation includes a plasma radiation source, and a foil trap provided with a plurality of thin foils that extend substantially parallel to the direction of radiation from the plasma source. A grid is disposed between the plasma radiation source and the foil trap. A space is located between the grid and the foil trap. The apparatus also include an electrical potential application circuit that is constructed and arranged to apply an electrical potential to the grid so that the grid repels electrons emitted by the plasma radiation source and creates a positive space charge between the grid and the foil trap to deflect ions emitted by the plasma radiation source to the foil trap.
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Banine Vadim Yevgenyevich
Ivanov Vladimir Vitalevich
Korop Evgeny Dmitrievich
Koshelev Konstantin Nikolaevich
Krivtsun Vladimir Mihallovitch
ASML Netherlands B.V.
Logie Michael J
Pillsbury Winthrop Shaw & Pittman LLP
Souw Bernard E
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