Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate
2006-03-31
2010-10-12
Hoang, Quoc D (Department: 2892)
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
C257SE45004
Reexamination Certificate
active
07812404
ABSTRACT:
In a novel nonvolatile memory cell formed above a substrate, a diode is paired with a reversible resistance-switching material, preferably a metal oxide or nitride such as, for example, NixOy, NbxOy, TixOy, HFxOy, AlxOy, MgxOy, CoxOy, CrxOy, VxOy, ZnxOy, ZrxOy, BxNy, and AlxNy. In preferred embodiments, the diode is formed as a vertical pillar disposed between conductors. Multiple memory levels can be stacked to form a monolithic three dimensional memory array. In some embodiments, the diode comprises germanium or a germanium alloy, which can be deposited and crystallized at relatively low temperatures, allowing use of aluminum or copper in the conductors. The memory cell of the present invention can be used as a rewriteable memory cell or a one-time-programmable memory cell, and can store two or more data states.
REFERENCES:
patent: 2655609 (1953-10-01), Shockley
patent: 2971140 (1961-02-01), Chappey et al.
patent: 3796926 (1974-03-01), Cole et al.
patent: 4204028 (1980-05-01), Donley
patent: 4499557 (1985-02-01), Holmberg et al.
patent: 4646266 (1987-02-01), Ovshinsky et al.
patent: 4772571 (1988-09-01), Scovell et al.
patent: 4907054 (1990-03-01), Berger
patent: 4940553 (1990-07-01), von Benda
patent: 5037200 (1991-08-01), Kodama
patent: 5166758 (1992-11-01), Ovshinsky et al.
patent: 5273915 (1993-12-01), Hwang et al.
patent: 5311055 (1994-05-01), Goodman et al.
patent: 5774394 (1998-06-01), Chen et al.
patent: 5876788 (1999-03-01), Bronner et al.
patent: 5915167 (1999-06-01), Leedy
patent: 6034882 (2000-03-01), Johnson et al.
patent: RE37259 (2001-07-01), Ovshinsky
patent: 6369431 (2002-04-01), Gonzalez et al.
patent: 6420215 (2002-07-01), Knall
patent: 6426891 (2002-07-01), Katori
patent: 6465370 (2002-10-01), Schrems et al.
patent: 6483734 (2002-11-01), Sharma et al.
patent: 6534841 (2003-03-01), Van Brocklin et al.
patent: 6541792 (2003-04-01), Tran et al.
patent: 6707698 (2004-03-01), Fricke et al.
patent: 6753561 (2004-06-01), Rinerson et al.
patent: 6761985 (2004-07-01), Windisch et al.
patent: 6774458 (2004-08-01), Fricke et al.
patent: 6778441 (2004-08-01), Forbes et al.
patent: 6787401 (2004-09-01), Gonzalez et al.
patent: 6798685 (2004-09-01), Rinerson et al.
patent: 6815744 (2004-11-01), Beck et al.
patent: 6831854 (2004-12-01), Rinerson et al.
patent: 6834008 (2004-12-01), Rinerson et al.
patent: 6836421 (2004-12-01), Rinerson et al.
patent: 6850429 (2005-02-01), Rinerson et al.
patent: 6850455 (2005-02-01), Rinerson et al.
patent: 6856536 (2005-02-01), Rinerson et al.
patent: 6859382 (2005-02-01), Rinerson et al.
patent: 6870755 (2005-03-01), Rinerson et al.
patent: 6946719 (2005-09-01), Petti et al.
patent: 6952030 (2005-10-01), Herner et al.
patent: 6952043 (2005-10-01), Vyvoda et al.
patent: 7116573 (2006-10-01), Sakamoto et al.
patent: 7172840 (2007-02-01), Chen et al.
patent: 7176064 (2007-02-01), Herner et al.
patent: 7215564 (2007-05-01), Happ et al.
patent: 7224013 (2007-05-01), Herner et al.
patent: 7238607 (2007-07-01), Dunton et al.
patent: 7265049 (2007-09-01), Herner et al.
patent: 7285464 (2007-10-01), Herner
patent: 7307013 (2007-12-01), Raghuram et al.
patent: 7307268 (2007-12-01), Scheuerlein
patent: 7391064 (2008-06-01), Tripsas et al.
patent: 7501331 (2009-03-01), Herner
patent: 7553611 (2009-06-01), Chen et al.
patent: 2002/0057594 (2002-05-01), Hirai
patent: 2003/0013007 (2003-01-01), Kaun
patent: 2003/0047727 (2003-03-01), Chiang
patent: 2003/0081446 (2003-05-01), Fricke et al.
patent: 2003/0209971 (2003-11-01), Kozicki
patent: 2004/0002186 (2004-01-01), Vyvoda et al.
patent: 2004/0084743 (2004-05-01), Vanbuskirk et al.
patent: 2004/0095300 (2004-05-01), So et al.
patent: 2004/0159828 (2004-08-01), Rinerson et al.
patent: 2004/0159867 (2004-08-01), Kinney et al.
patent: 2004/0159869 (2004-08-01), Rinerson et al.
patent: 2004/0160798 (2004-08-01), Rinerson et al.
patent: 2004/0160804 (2004-08-01), Rinerson et al.
patent: 2004/0160805 (2004-08-01), Rinerson et al.
patent: 2004/0160806 (2004-08-01), Rinerson et al.
patent: 2004/0160807 (2004-08-01), Rinerson et al.
patent: 2004/0160808 (2004-08-01), Rinerson et al.
patent: 2004/0160812 (2004-08-01), Rinerson et al.
patent: 2004/0160817 (2004-08-01), Rinerson et al.
patent: 2004/0160818 (2004-08-01), Rinerson et al.
patent: 2004/0160819 (2004-08-01), Rinerson et al.
patent: 2004/0161888 (2004-08-01), Rinerson et al.
patent: 2004/0170040 (2004-09-01), Rinerson et al.
patent: 2004/0228172 (2004-11-01), Rinerson et al.
patent: 2004/0245557 (2004-12-01), Seo et al.
patent: 2005/0045919 (2005-03-01), Kaeriyama et al.
patent: 2005/0052915 (2005-03-01), Herner
patent: 2005/0058009 (2005-03-01), Yang
patent: 2005/0167699 (2005-08-01), Sugita et al.
patent: 2005/0221200 (2005-10-01), Chen et al.
patent: 2005/0226067 (2005-10-01), Herner
patent: 2005/0247921 (2005-11-01), Lee et al.
patent: 2005/0286211 (2005-12-01), Pinnow et al.
patent: 2006/0006495 (2006-01-01), Herner et al.
patent: 2006/0067117 (2006-03-01), Petti
patent: 2006/0094236 (2006-05-01), Elkins
patent: 2006/0098472 (2006-05-01), Ahn et al.
patent: 2006/0128153 (2006-06-01), Dunton et al.
patent: 2006/0157679 (2006-07-01), Scheuerlein
patent: 2006/0164880 (2006-07-01), Sakamoto et al.
patent: 2006/0249753 (2006-11-01), Herner
patent: 2006/0250836 (2006-11-01), Herner et al.
patent: 2006/0268594 (2006-11-01), Toda
patent: 2006/0273298 (2006-12-01), Petti
patent: 2007/0010100 (2007-01-01), Raghuram et al.
patent: 2007/0072360 (2007-03-01), Kumar et al.
patent: 2007/0114508 (2007-05-01), Herner et al.
patent: 2007/0114509 (2007-05-01), Herner
patent: 2007/0228354 (2007-10-01), Scheuerlein
patent: 2007/0228414 (2007-10-01), Kumar et al.
patent: 2007/0236981 (2007-10-01), Herner
patent: 2007/0246743 (2007-10-01), Cho et al.
patent: 2008/0175032 (2008-07-01), Tanaka et al.
patent: 2009/0001342 (2009-01-01), Schricker et al.
patent: 2009/0001343 (2009-01-01), Schricker et al.
patent: 2009/0001344 (2009-01-01), Schricker et al.
patent: 2009/0001345 (2009-01-01), Schricker et al.
patent: 2009/0104756 (2009-04-01), Kumar
patent: 2009/0236581 (2009-09-01), Yoshida et al.
patent: 1 308 960 (2003-05-01), None
patent: 1 484 799 (2004-12-01), None
patent: 1 513 159 (2005-03-01), None
patent: 1 914 806 (2008-04-01), None
patent: 1 284 645 (1972-08-01), None
patent: 1416644 (1975-12-01), None
patent: 62042582 (1987-02-01), None
patent: 100 717 286 (2007-05-01), None
patent: WO 97/41606 (1997-11-01), None
patent: 0049659 (2000-08-01), None
patent: WO 01/69655 (2001-09-01), None
patent: WO 03/079463 (2003-09-01), None
patent: WO 2005/024839 (2005-03-01), None
patent: WO 2006/078505 (2006-07-01), None
patent: WO 2006/121837 (2006-11-01), None
patent: WO 2006/121837 (2006-11-01), None
patent: WO 2007/004843 (2007-01-01), None
patent: WO 2007/038709 (2007-04-01), None
patent: WO 2007/062022 (2007-05-01), None
patent: WO 2007/067448 (2007-06-01), None
patent: WO 2007/072308 (2007-06-01), None
patent: WO 2008/097742 (2008-08-01), None
Fuschillo, et al., “Non-Linear Transport and Switching Properties of Transition Metal Oxides,” 6th International Vacuum Congress, Kyoto Japan, Mar. 25-29, 1974, Japanese Journal of Applied Physics Suppl., vol. 2, No. 1, 1974, pp. 817-820, XP002429046, ISSN: 0021-4922.
Beck, et al., “Reproducible Switching Effect in Thin Oxide Films for Memory Applications,” Applied Physics Letters, vol. 77, No. 1, Jul. 3, 2000, pp. 139-141, XP00958527, ISSN: 0003-6951.
Baek et al., “Multi-layer Cross-point Binary Oxide Resistive Memory (OxRRAM) for Post-NAND Storage Application,” 2005, pp. 1-4, IEEE.
Baek, I.G.,et al., Highly Scalable Non-volatile Resistive Memory Using Simple Binary Oxide Driven By Asymmetric Unipolar Voltage Pulses-, IEDM (2004), (Jan. 2004), 587-590.
Bruyere et al., “Switching and Negative Resistance in Thin Films of Nickel Oxide”, Applied Physics Letters, vol. 16, No. 1, Jan. 1, 1970, pp. 40-43.
Hiatt et al., “Bistable Switching in Niobium Oxide Diodes,” Applied Physics Letters, Mar. 15, 1965, vol. 6, No. 6, pp. 106-108.
Hwang et al., “Molecular dyna
Herner S. Brad
Kumar Tanmay
Petti Christopher J.
Dugan & Dugan PC
Hoang Quoc D
SanDisk 3D LLC
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