Suspended gas distribution manifold for plasma chamber

Details Suspended gas distribution manifold for plasma chamber Suspended gas distribution manifold for plasma chamber

2004-06-15

2009-02-03

Zervigon, Rudy (Department: 1792)

Coating apparatus

Gas or vapor deposition

With treating means

C118S715000, C156S345330, C156S345430, C156S345260

Reexamination Certificate

active

07484473

ABSTRACT:
A gas inlet manifold for a plasma chamber having a perforated gas distribution plate suspended by a side wall comprising one or more sheets. The sheets preferably provide flexibility to alleviate stress in the gas distribution plate due to thermal expansion and contraction. In another aspect, the side wall provides thermal isolation between the gas distribution plate and other components of the chamber.

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