Method of forming floating gate array of flash memory device

Details Method of forming floating gate array of flash memory device Method of forming floating gate array of flash memory device

2006-12-20

2009-10-20

Richards, N Drew (Department: 2895)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S142000, C438S238000, C438S257000, C438S258000, C438S268000, C257SE21682

Reexamination Certificate

active

07605036

ABSTRACT:
The method of forming a floating gate array of a flash memory device includes: (a) forming a plurality of device isolations, which define active device regions, in a semiconductor substrate, the device isolations being formed such that upper portions thereof protrude from a surface of the substrate by a predetermined height; (b) forming tunnel oxide layers in the active device regions; (c) forming a floating gate-forming layer throughout an entire region of the substrate, including regions in which the plurality of device isolations and the active device regions are formed, the floating gate-forming layer being formed such that grooves are formed along the active device regions; (d) filling the grooves formed on the floating gate-forming layer with masking materials; and (e) patterning the floating gate-forming layer, using the masking materials filling the grooves as an etching mask.

REFERENCES:
patent: 6309926 (2001-10-01), Bell et al.
patent: 6475894 (2002-11-01), Huang et al.

Affiliated with

Also associated with

Rating

Method of forming floating gate array of flash memory device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of forming floating gate array of flash memory device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of forming floating gate array of flash memory device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4099358