Semiconductor device having a channel pattern and method of...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S302000, C438S268000

Reexamination Certificate

active

07579648

ABSTRACT:
A semiconductor device may include a tubular channel pattern vertically extending from a semiconductor substrate. A gate insulation layer may be provided on faces exposed through the channel pattern. A gate electrode may be provided on the gate insulation layer. The gate electrode may fill the channel pattern. A conductive region, which may serve as lower source/drain regions, may be formed at a surface portion of the semiconductor substrate. The conductive region may contact a lower portion of the channel pattern. A conductive pattern, which may serve as upper source/drain regions, may horizontally extend from an upper portion of the channel pattern.

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patent: 6885041 (2005-04-01), Awano
patent: 7053447 (2006-05-01), Verhoeven
patent: 2007/0018206 (2007-01-01), Forbes
patent: 0155840 (1998-07-01), None
patent: 10-0406578 (2003-11-01), None
patent: 10-0422412 (2004-02-01), None

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