Process of making a semiconductor device using multiple...

Details Process of making a semiconductor device using multiple... Process of making a semiconductor device using multiple...

2006-02-17

2009-02-03

Dang, Phuc T (Department: 2892)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S072000, C257SE21029, C430S311000

Reexamination Certificate

active

07485573

ABSTRACT:
A lithographic structure consisting essentially of: an organic antireflective material disposed on a substrate; a vapor-deposited RCHX material, wherein R is one or more elements selected from the group consisting of Si, Ge, B, Sn, Fe and Ti, and wherein X is not present or is one or more elements selected from the group consisting of O, N, S and F; and a photoresist material disposed on the RCHX material. The invention is also directed to methods of making the lithographic structure, and using the structure to pattern a substrate.

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