Spectrum based endpointing for chemical mechanical polishing

Details Spectrum based endpointing for chemical mechanical polishing Spectrum based endpointing for chemical mechanical polishing

2007-05-11

2009-11-10

Eley, Timothy V (Department: 3724)

Abrading

Abrading process

C451S006000, C451S036000, C451S041000, C451S059000, C451S063000

Reexamination Certificate

active

07614936

ABSTRACT:
Methods and apparatus for providing a flushing system for flushing a top surface of an optical head. The flushing system includes a source of gas configured to provide a flow of gas, a delivery nozzle, a delivery line that connects the source of gas to the delivery nozzle, a vacuum source configured to provide a vacuum, a vacuum nozzle, and a vacuum line that connects the vacuum source to the vacuum nozzle. The source of gas and the delivery nozzle are configured to direct a flow of gas across the top surface of the optical head. The vacuum nozzle and vacuum sources are configured so that the flow if gas is laminar.

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