Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2007-01-26
2009-10-27
Berman, Jack I (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S306000, C250S307000, C250S309000, C250S311000, C250S492100, C250S492200, C250S492300
Reexamination Certificate
active
07608821
ABSTRACT:
A substrate inspection apparatus includes: an electron gun which generates an electron beam to irradiate the electron beam to a substrate; an electron detection unit which detects at least one of a secondary electron, a reflection electron and a back scattering electron generated from a surface of the substrate by the irradiation of the electron beam to output signals constituting an image showing a state of the substrate surface; and a surface potential uniformizing unit which generates ions, and irradiates the ions to the substrate before the irradiation of the electron beam to uniformize a surface potential of the substrate.
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Nagahama Ichirota
Onishi Atsushi
Yamazaki Yuichiro
Berman Jack I
Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Ippolito Rausch Nicole
Kabushiki Kaisha Toshiba
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