Semiconductor processing system and method

Details Semiconductor processing system and method Semiconductor processing system and method

2006-05-31

2008-10-28

Dang, Phuc T (Department: 2892)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S676000, C118S711000

Reexamination Certificate

active

07442615

ABSTRACT:
Systems and methods are disclosed to perform semiconductor processing with a process chamber; a flash lamp adapted to be repetitively triggered; and a controller coupled to the control input of the flash lamp to trigger the flash lamp. The system can deploy a solid state plasma source in parallel with the flash lamp in wafer processing.

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“Design Considerations for Triggering of Flashlamps,” A. McLeod, http://optoelectronics.perkinelmer.com/content/whitepapers/TriggeringFlashlamps.pdf, 1998.

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