Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate
2008-04-01
2008-04-01
Le, Dung A. (Department: 2818)
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
C257S332000, C257S333000, C438S138000, C438S183000
Reexamination Certificate
active
11194060
ABSTRACT:
A semiconductor power device includes a substrate of a first conductivity type and an epitaxial layer of the first conductivity type over and in contact with the substrate. A first trench extends into and terminates within the epitaxial layer. A sinker trench extends from the top surface of the epitaxial layer through the epitaxial layer and terminates within the substrate. The sinker trench is laterally spaced from the first trench, and is wider and extends deeper than the first trench. The sinker trench is lined with an insulator only along the sinker trench sidewalls so that a conductive material filling the sinker trench makes electrical contact with the substrate along the bottom of the trench and makes electrical contact with an interconnect layer along the top of the trench.
REFERENCES:
patent: 3404295 (1968-10-01), Warner et al.
patent: 3412297 (1968-11-01), Amlinger
patent: 3497777 (1970-02-01), Teszner et al.
patent: 3564356 (1971-02-01), Wilson
patent: 3660697 (1972-05-01), Berglund et al.
patent: 4003072 (1977-01-01), Matsushita et al.
patent: 4011105 (1977-03-01), Paivinen et al.
patent: 4300150 (1981-11-01), Colak
patent: 4324038 (1982-04-01), Chang et al.
patent: 4326332 (1982-04-01), Kenney et al.
patent: 4337474 (1982-06-01), Yukimoto
patent: 4338616 (1982-07-01), Bol
patent: 4345265 (1982-08-01), Blanchard
patent: 4445202 (1984-04-01), Goetze et al.
patent: 4568958 (1986-02-01), Baliga
patent: 4579621 (1986-04-01), Hine
patent: 4636281 (1987-01-01), Buiguez et al.
patent: 4638344 (1987-01-01), Cardwell, Jr.
patent: 4639761 (1987-01-01), Singer et al.
patent: 4673962 (1987-06-01), Chatterjee et al.
patent: 4694313 (1987-09-01), Beasom
patent: 4698653 (1987-10-01), Cardwell, Jr.
patent: 4716126 (1987-12-01), Cogan
patent: 4745079 (1988-05-01), Pfiester
patent: 4746630 (1988-05-01), Hui et al.
patent: 4754310 (1988-06-01), Coe
patent: 4767722 (1988-08-01), Blanchard
patent: 4774556 (1988-09-01), Fujii et al.
patent: 4801986 (1989-01-01), Chang et al.
patent: 4821095 (1989-04-01), Temple
patent: 4823176 (1989-04-01), Baliga et al.
patent: 4824793 (1989-04-01), Richardson et al.
patent: 4853345 (1989-08-01), Himelick
patent: 4868624 (1989-09-01), Grung et al.
patent: 4893160 (1990-01-01), Blanchard
patent: 4914058 (1990-04-01), Blanchard
patent: 4941026 (1990-07-01), Temple
patent: 4961100 (1990-10-01), Baliga et al.
patent: 4967245 (1990-10-01), Cogan et al.
patent: 4969028 (1990-11-01), Baliga
patent: 4974059 (1990-11-01), Kinzer
patent: 4990463 (1991-02-01), Mori
patent: 4992390 (1991-02-01), Chang
patent: 5023196 (1991-06-01), Johnsen et al.
patent: 5027180 (1991-06-01), Nishizawa et al.
patent: 5034785 (1991-07-01), Blanchard
patent: 5065273 (1991-11-01), Rajeevakumar
patent: 5071782 (1991-12-01), Mori
patent: 5072266 (1991-12-01), Bulucea
patent: 5079608 (1992-01-01), Wodarczyk et al.
patent: 5105243 (1992-04-01), Nakagawa et al.
patent: 5111253 (1992-05-01), Korman et al.
patent: 5134448 (1992-07-01), Johnsen et al.
patent: 5142640 (1992-08-01), Iwamatsu
patent: 5156989 (1992-10-01), Williams et al.
patent: 5164325 (1992-11-01), Cogan et al.
patent: 5164802 (1992-11-01), Jones et al.
patent: 5168331 (1992-12-01), Yilmaz
patent: 5168973 (1992-12-01), Asayama et al.
patent: 5188973 (1993-02-01), Omura et al.
patent: 5208657 (1993-05-01), Chatterjee et al.
patent: 5216275 (1993-06-01), Chen
patent: 5219777 (1993-06-01), Kang
patent: 5219793 (1993-06-01), Cooper et al.
patent: 5233215 (1993-08-01), Baliga
patent: 5242845 (1993-09-01), Baba et al.
patent: 5250450 (1993-10-01), Lee et al.
patent: 5262336 (1993-11-01), Pike, Jr. et al.
patent: 5268311 (1993-12-01), Euen et al.
patent: 5270257 (1993-12-01), Shin
patent: 5275961 (1994-01-01), Smayling et al.
patent: 5275965 (1994-01-01), Manning
patent: 5281548 (1994-01-01), Prall
patent: 5283201 (1994-02-01), Tsang et al.
patent: 5283452 (1994-02-01), Shih et al.
patent: 5294824 (1994-03-01), Okada
patent: 5298761 (1994-03-01), Cogan et al.
patent: 5300447 (1994-04-01), Anderson
patent: 5300452 (1994-04-01), Chang et al.
patent: 5326711 (1994-07-01), Malhi
patent: 5346834 (1994-09-01), Hisamoto et al.
patent: 5349224 (1994-09-01), Gilbert et al.
patent: 5350937 (1994-09-01), Yamazaki et al.
patent: 5365102 (1994-11-01), Mehrotra et al.
patent: 5366914 (1994-11-01), Takahashi et al.
patent: 5378655 (1995-01-01), Hutchings et al.
patent: 5389815 (1995-02-01), Takahashi
patent: 5405794 (1995-04-01), Kim
patent: 5418376 (1995-05-01), Muraoka et al.
patent: 5424231 (1995-06-01), Yang
patent: 5429977 (1995-07-01), Lu et al.
patent: 5430311 (1995-07-01), Murakami et al.
patent: 5430324 (1995-07-01), Bencuya
patent: 5436189 (1995-07-01), Beasom
patent: 5438007 (1995-08-01), Vinal et al.
patent: 5438215 (1995-08-01), Tihanyi
patent: 5442214 (1995-08-01), Yang
patent: 5454435 (1995-10-01), Baliga
patent: 5473176 (1995-12-01), Kakumoto
patent: 5473180 (1995-12-01), Ludikhuize
patent: 5474943 (1995-12-01), Hshieh et al.
patent: 5488010 (1996-01-01), Wong
patent: 5519245 (1996-05-01), Tokura et al.
patent: 5532179 (1996-07-01), Chang et al.
patent: 5541425 (1996-07-01), Nishihara
patent: 5554552 (1996-09-01), Chi
patent: 5554862 (1996-09-01), Omura et al.
patent: 5567634 (1996-10-01), Hebert et al.
patent: 5567635 (1996-10-01), Acovic et al.
patent: 5572048 (1996-11-01), Sugawara
patent: 5576245 (1996-11-01), Cogan et al.
patent: 5578851 (1996-11-01), Hshieh et al.
patent: 5581100 (1996-12-01), Ajit
patent: 5583060 (1996-12-01), Hertrich et al.
patent: 5583065 (1996-12-01), Miwa
patent: 5589405 (1996-12-01), Contiero et al.
patent: 5592005 (1997-01-01), Floyd et al.
patent: 5593909 (1997-01-01), Han et al.
patent: 5595927 (1997-01-01), Chen et al.
patent: 5597765 (1997-01-01), Yilmaz et al.
patent: 5605852 (1997-02-01), Bencuya
patent: 5614749 (1997-03-01), Ueno
patent: 5616945 (1997-04-01), Williams
patent: 5623152 (1997-04-01), Majumdar et al.
patent: 5629543 (1997-05-01), Hshieh et al.
patent: 5637898 (1997-06-01), Baliga
patent: 5639676 (1997-06-01), Hshieh et al.
patent: 5640034 (1997-06-01), Malhi
patent: 5648283 (1997-07-01), Tsang et al.
patent: 5648670 (1997-07-01), Blanchard
patent: 5656843 (1997-08-01), Goodyear et al.
patent: 5665619 (1997-09-01), Kwan et al.
patent: 5670803 (1997-09-01), Beilstein, Jr. et al.
patent: 5684320 (1997-11-01), Kawashima
patent: 5689128 (1997-11-01), Hshieh et al.
patent: 5693569 (1997-12-01), Ueno
patent: 5705409 (1998-01-01), Witek
patent: 5710072 (1998-01-01), Krautschneider et al.
patent: 5714781 (1998-02-01), Yamamoto et al.
patent: 5717237 (1998-02-01), Chi
patent: 5719409 (1998-02-01), Singh et al.
patent: 5721148 (1998-02-01), Nishimura
patent: 5744372 (1998-04-01), Bulucea
patent: 5767004 (1998-06-01), Balasubramanian et al.
patent: 5770878 (1998-06-01), Beasom
patent: 5776813 (1998-07-01), Huang et al.
patent: 5780343 (1998-07-01), Bashir
patent: 5801082 (1998-09-01), Tseng
patent: 5801417 (1998-09-01), Tsang et al.
patent: 5814858 (1998-09-01), Williams
patent: 5821583 (1998-10-01), Hshieh et al.
patent: 5877528 (1999-03-01), So
patent: 5879971 (1999-03-01), Witek
patent: 5879994 (1999-03-01), Kwan et al.
patent: 5891776 (1999-04-01), Han et al.
patent: 5894157 (1999-04-01), Han et al.
patent: 5895951 (1999-04-01), So et al.
patent: 5895952 (1999-04-01), Darwish et al.
patent: 5897343 (1999-04-01), Mathew et al.
patent: 5897360 (1999-04-01), Kawaguchi
patent: 5900663 (1999-05-01), Johnson et al.
patent: 5906680 (1999-05-01), Meyerson
patent: 5907776 (1999-05-01), Hshieh et al.
patent: 5917216 (1999-06-01), Floyd et al.
patent: 5929481 (1999-07-01), Hshieh et al.
patent: 5943581 (1999-08-01), Lu et al.
patent: 5945708 (1999-08-01), Tihanyi
patent: 5949104 (1999-09-01), D'Anna et al.
patent: 5949124 (1999-09-01), Hadizad et al.
patent: 5959324 (1999-09-01), Kohyama
patent: 5960271 (1999-09-01), Wollesen et al.
patent: 5960311 (1999-09-01), Singh et al.
patent: 5972741 (1999-10-01), Kubo et al.
patent: 5973360 (1999-10-01), Tihanyi
patent: 5973367 (1999-10-01), Williams
patent: 5976936 (1999-11-01), Miyajima et al.
patent: 5977591 (1999-11-01), Fratin et al.
patent: 5981344 (199
Dolny Gary M.
Grebs Thomas E.
Fairchild Semiconductor Corporation
Le Dung A.
Townsend and Townsend / and Crew LLP
LandOfFree
Semiconductor power device having a top-side drain using a... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Semiconductor power device having a top-side drain using a..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor power device having a top-side drain using a... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3947179