Etching a substrate: processes – Forming or treating optical article
Reexamination Certificate
2008-07-22
2008-07-22
Deo, Duy-Vu N. (Department: 1765)
Etching a substrate: processes
Forming or treating optical article
C216S072000, C216S074000, C216S080000, C359S291000, C359S224200, C359S223100, C359S290000, C359S292000, C359S298000
Reexamination Certificate
active
11370417
ABSTRACT:
A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more springs connecting the beam to a bonding pad. The mirror can have a bottom surface for reflecting light. The mirror can include a top flange and a bottom flange joined by a web, wherein the top and the bottom flanges form the top and the bottom surfaces, respectively. The rotational comb teeth can have a tapered shape. Stationary comb teeth can be interdigitated with the rotational comb teeth either in-plane or out-of-plane. Steady or oscillating voltage difference between the rotational and the stationary comb teeth can be used to oscillate or tune the mirror.
REFERENCES:
patent: 6353492 (2002-03-01), McClelland et al.
patent: 6914711 (2005-07-01), Novotny et al.
patent: 2005/0002085 (2005-01-01), Matsui
patent: 2682181 (1991-10-01), None
patent: 2003-172897 (2003-06-01), None
patent: 2004-37886 (2004-02-01), None
Advanced NuMicro Systems, Inc.
Angadi Maki
Deo Duy-Vu N.
Hsia David C.
Patent Law Group LLP
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