System, method, and medium for monitoring performance of an...

Details System, method, and medium for monitoring performance of an... System, method, and medium for monitoring performance of an...

2008-04-08

2008-04-08

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S031000, C700S121000

Reexamination Certificate

active

10765921

ABSTRACT:
A method for monitoring performance of an advanced process control system for at least one process output includes calculating a variance of a prediction error for a processing performance and/or a probability for violating specification limits of the processing performance of the at least one process output. If the variance of the prediction error is calculated, the method also includes calculating a model health index. If the probability for violating specification limits is calculated, the method further includes calculating a process health index.

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