Semiconductor device and process for manufacturing the same

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257SE21415

Reexamination Certificate

active

11260197

ABSTRACT:
The present invention provides a semiconductor device comprising: a semiconductor layer (3); a gate electrode (11) formed on the semiconductor layer (3) via a gate insulation film (10); and a first insulation film (13) formed at one or more of sidewalls of the semiconductor layer (3), the gate insulation film (10) and the gate electrode (11); wherein the first insulation film (13) overlies a part of the gate insulation film (10) surface. According to the semiconductor device, leakage current at the isolation edge can be suppressed and thus reliability can be improved.

REFERENCES:
patent: 5650339 (1997-07-01), Saito et al.
patent: 6150241 (2000-11-01), Deleonibus
patent: 2003/0014918 (2003-01-01), Burch et al.
patent: 2005/0024918 (2005-02-01), Salling et al.
patent: 8-213494 (1996-08-01), None
patent: 9-199730 (1997-07-01), None
patent: 10-150204 (1998-06-01), None
patent: 2000-514241 (2000-10-01), None
patent: 2000-082813 (2000-03-01), None

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