Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Reexamination Certificate
2007-12-25
2007-12-25
Meeks, Timothy (Department: 1762)
Coating processes
Coating by vapor, gas, or smoke
Mixture of vapors or gases utilized
C427S250000, C427S253000, C427S255360, C427S255390, C438S680000, C438S685000, C438S785000
Reexamination Certificate
active
10230592
ABSTRACT:
A method and apparatus are presented for reducing halide-based contamination within deposited titanium-based thin films. Halide adsorbing materials are utilized within the deposition chamber to remove halides, such as chlorine and chlorides, during the deposition process so that contamination of the titanium-based film is minimized. A method for regenerating the halide adsorbing material is also provided.
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Basceri Cem
Derderian Garo J.
Westmoreland Donald L.
Fletcher Yoder
Meeks Timothy
Stouffer Kelly M
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