4. Semiconductor device manufacturing: process
  5. Making passive device

Garo J. Derderian

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ALD method to improve surface coverage

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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ALD method to improve surface coverage

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Apparatus and method for depositing materials onto...

Coating apparatus – Program – cyclic – or time control
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Apparatus and methods for plasma vapor deposition processes

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
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Apparatus and methods for plasma vapor deposition processes

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
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Profile ID: LFUS-PAI-P-809661

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