Vacuum compatible fastener and fastening system

Details Vacuum compatible fastener and fastening system Vacuum compatible fastener and fastening system

1996-06-28

1998-08-11

Wilson, Neill R.

Expanded, threaded, driven, headed, tool-deformed, or locked-thr

Headed fastener element

Having resilient securing structure on shank

411 21, 411392, 411913, F16B 1900, F16B 1304

Patent

active

057918503

ABSTRACT:
A vacuum compatible fastener useful for fastening a workpiece. The fastener has a head section at an upper end of the fastener of a first diameter. A shank section extends from the head section and includes a spring or spring-like element which allows the fastener to be stretched and pretensioned. The shank section has a diameter less than the diameter of the head section. A tip section at a lower end of the fastener extends from the shank section. The tip section includes one or more retractable elements having upper ends extending radially outward away from the tip section in the non-retracted state for gripping a sidewall of a workpiece receiving hole. An opening extends along the central axis of the fastener through the head section to the tip section. The fastener minimizes contamination and allows high pumpdown rates in vacuum processing tools such as semiconductor manufacturing process tools.

REFERENCES:
patent: 2509192 (1950-05-01), Poupitch
patent: 2560530 (1951-07-01), Burdick
patent: 3747169 (1973-07-01), Anderson et al.
patent: 3827125 (1974-08-01), Matthews
patent: 4014438 (1977-03-01), O'Toole et al.
patent: 4204566 (1980-05-01), Kirrish et al.
patent: 4270035 (1981-05-01), Richter, Sr.
patent: 4591203 (1986-05-01), Furman
patent: 4947502 (1990-08-01), Engelhardt
patent: 5061137 (1991-10-01), Gourd

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