Small electron gun

Details Small electron gun Small electron gun

2007-07-03

2007-07-03

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S42300F

Reexamination Certificate

active

10873358

ABSTRACT:
To provide a small electron gun capable of keeping a high vacuum pressure used for an electron microscope and an electron-beam drawing apparatus. An electron gun constituted by a nonevaporative getter pump, a heater, a filament, and an electron-source positioning mechanism is provided with an opening for rough exhausting and its automatically opening/closing valve, and means for ionizing and decomposing an inert gas or a compound gas for the nonevaporative getter pump. It is possible to keep a high vacuum pressure of 10−10Torr without requiring an ion pump by using a small electron gun having a height and a width of approximately 15 cm while emitting electrons from the electron gun.

REFERENCES:
patent: 4833362 (1989-05-01), Crewe
patent: 5399860 (1995-03-01), Miyoshi et al.
patent: 6949752 (2005-09-01), Okura et al.
patent: 2000-149850 (1990-06-01), None
patent: 6-111745 (1992-09-01), None
patent: 6-188294 (1993-05-01), None
patent: 2000-294182 (1999-04-01), None
patent: 2001-325912 (2000-05-01), None

Affiliated with

Also associated with

Rating

Small electron gun does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Small electron gun, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Small electron gun will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3805737