Thin film resistors of different materials

Details Thin film resistors of different materials Thin film resistors of different materials

2007-03-20

2007-03-20

Hoang, Tu (Department: 2832)

Electrical resistors

With base extending along resistance element

Resistance element and base formed in layers

C338S309000

Reexamination Certificate

active

10711460

ABSTRACT:
An integrated circuit includes a bilayer thin film resistor in which the lower layer is a seed layer that controls the crystal structure of the upper layer. The thickness of the lower layer and the thickness of the upper layer may be chosen to form a resistor with a TCR having a design value.

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