Method for optimizing a number of kernels used in a sum of...

Details Method for optimizing a number of kernels used in a sum of... Method for optimizing a number of kernels used in a sum of...

2006-10-24

2006-10-24

Siek, Vuthe (Department: 2825)

Computer-aided design and analysis of circuits and semiconductor

Nanotechnology related integrated circuit design

C716S030000, C716S030000, C716S030000

Reexamination Certificate

active

07127699

ABSTRACT:
A method is provided for optimizing the number of kernels N used in a sum of coherent sources (SOCS) for optical proximity correction in an optical microlithography process, including setting the number of kernels N to a predetermined minimum value Nmin, where a determination is made as to whether an accuracy estimate of calculated intensity is within a tolerable value, and a determination is also made as to whether an added X/Y asymmetry estimate of the calculated intensity is negligible.

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patent: 2003/0140330 (2003-07-01), Tanaka et al.

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