Method of forming a polishing pad for endpoint detection

Details Method of forming a polishing pad for endpoint detection Method of forming a polishing pad for endpoint detection

2006-10-10

2006-10-10

Shakeri, Hadi (Department: 3723)

Abrading

Abrading process

Glass or stone abrading

C451S527000

Reexamination Certificate

active

07118457

ABSTRACT:
A method of forming a polishing pad with a polishing layer having a polishing surface and a back surface. A plurality of grooves are formed on the polishing surface, and an indentation is formed in the back surface of the polishing layer. A region on the polishing surface corresponding to the indentation in the back surface is free of grooves or has shallower grooves.

REFERENCES:
patent: 5196353 (1993-03-01), Sandhu et al.
patent: 5257478 (1993-11-01), Hyde et al.
patent: 5433651 (1995-07-01), Lustig et al.
patent: 5489233 (1996-02-01), Cook et al.
patent: 5605760 (1997-02-01), Roberts
patent: 5609511 (1997-03-01), Moriyama et al.
patent: 5838447 (1998-11-01), Hiyama et al.
patent: 5893796 (1999-04-01), Birang et al.
patent: 5949927 (1999-09-01), Tang
patent: 5964643 (1999-10-01), Birang et al.
patent: 6045439 (2000-04-01), Birang et al.
patent: 6068539 (2000-05-01), Bajaj et al.
patent: 6146248 (2000-11-01), Jairath et al.
patent: 6179709 (2001-01-01), Redeker et al.
patent: 6248130 (2001-06-01), Perry
patent: 6254459 (2001-07-01), Bajaj et al.
patent: 6280290 (2001-08-01), Birang et al.
patent: 6428386 (2002-08-01), Bartlett
patent: 6433541 (2002-08-01), Lehman et al.
patent: 6458014 (2002-10-01), Ihsikawa et al.
patent: 6488568 (2002-12-01), Treur et al.
patent: 6524164 (2003-02-01), Tolles
patent: 6537133 (2003-03-01), Birang et al.
patent: 6586337 (2003-07-01), Parikh
patent: 6621264 (2003-09-01), Lehman et al.
patent: 6641471 (2003-11-01), Pinheiro et al.
patent: 6685537 (2004-02-01), Fruitman et al.
patent: 6729950 (2004-05-01), Park et al.
patent: 2001/0036805 (2001-11-01), Birang et al.
patent: 2003/0236055 (2003-12-01), Swedek et al.
patent: 2005/0060943 (2005-03-01), Turner et al.
patent: 0738561 (1996-10-01), None
patent: 0881484 (1998-12-01), None
patent: 11164552 (2001-07-01), None
patent: 0738561 (2002-01-01), None
patent: 0881040 (2002-08-01), None
patent: 57-138575 (1982-08-01), None
patent: 60-037076 (1985-02-01), None
patent: 03-234467 (1991-10-01), None
patent: 05-138531 (1993-06-01), None
patent: 05-309558 (1993-11-01), None
patent: 07-052032 (1995-02-01), None
patent: 09-036072 (1997-02-01), None
patent: 93/20976 (1993-10-01), None
patent: 01/89765 (2001-11-01), None
patent: 02/087825 (2002-11-01), None

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