Semiconductor integrated circuit including a DRAM and an...

Details Semiconductor integrated circuit including a DRAM and an... Semiconductor integrated circuit including a DRAM and an...

2006-10-10

2006-10-10

Crane, Sara (Department: 2811)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S253000, C438S393000, C438S672000, C438S675000

Reexamination Certificate

active

07118957

ABSTRACT:
A semiconductor device including an interlayer insulation film formed on a substrate so as to cover first and second regions defined on the substrate, and a capacitor formed over the interlayer insulation film in the first region, wherein the interlayer insulation film includes, in the first region, a stepped part defined by a groove having a bottom surface lower in level than a surface of the interlayer insulation film in the second region.

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Rudolf E. Graf, Dictionary of Electronics, 1999, Reed Elsevier, 7thEd. p. 96.

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