Semiconductor wafer preheating

Details Semiconductor wafer preheating Semiconductor wafer preheating

2006-02-28

2006-02-28

Bahta, Kidest (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S096000, C029S025010, C414S217000

Reexamination Certificate

active

07006888

ABSTRACT:
Embodiments of the present invention provide a method, article of manufacture, and apparatus for processing semiconductor wafers. The method includes preheating a semiconductor wafer in two types of chambers. In one embodiment, a first preheating chamber is a load lock and a second preheating chamber is a transition chamber. Semiconductor wafer processing systems which can perform embodiments of the method are presented.

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