Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
Reexamination Certificate
2006-05-02
2006-05-02
Pert, Evan (Department: 2826)
Semiconductor device manufacturing: process
Coating of substrate containing semiconductor region or of...
Multiple layers
Reexamination Certificate
active
07037858
ABSTRACT:
A method for manufacturing a semiconductor device includes forming a barrier layer on an individual device formed on a semiconductor substrate and including a MOS transistor. An ozone process is performed on the barrier layer. A pre-metal dielectric (I′MD) layer is then formed on the barrier layer.
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DongbuAnam Semiconductor Inc.
Pert Evan
Pillsbury Winthrop Shaw & Pittman LLP
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