Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate
2006-01-31
2006-01-31
Nguyen, Ha (Department: 2812)
Semiconductor device manufacturing: process
With measuring or testing
Reexamination Certificate
active
06991945
ABSTRACT:
A method and apparatus is provided for fault detection spanning multiple processes. The method comprises receiving operational data associated with a first process, receiving operational data associated with a second process, which is downstream to the first process and performing fault detection analysis based on the operational data associated with the first process and second process using a common fault detection unit.
REFERENCES:
patent: 6303395 (2001-10-01), Nulman
Castle Howard E.
Cherry Gregory A.
Cusson Brian K.
Green Eric O.
Markle Richard J.
Advanced Micro Devices , Inc.
Nguyen Ha
Stevenson Andre′ C.
Williams Morgan & Amerson P.C.
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