4. Semiconductor device manufacturing: process
  5. With measuring or testing

Eric O. Green

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Advanced process control of the manufacture of an...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
Reexamination Certificate

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Determination of a process flow based upon fault detection...

Semiconductor device manufacturing: process – With measuring or testing
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Determining a next tool state based on fault detection...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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Determining the health of a desired node in a multi-level...

Error detection/correction and fault detection/recovery – Pulse or data error handling – Digital logic testing
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Fault detection spanning multiple processes

Semiconductor device manufacturing: process – With measuring or testing
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