Method for producing semiconductor memory devices and...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C438S216000

Reexamination Certificate

active

07041545

ABSTRACT:
The invention provides an integration scheme for a memory cell array, especially a charge-trapping memory cell array, comprising an architecture of local interconnects, which enables to avoid nitride insulations of wordline stacks and to produce CMOS devices of different structures and dimensions in standard technology along with the tinier memory cell transistors.

REFERENCES:
patent: 5768192 (1998-06-01), Eitan
patent: 6011725 (2000-01-01), Eitan
patent: 6548861 (2003-04-01), Palm et al.
patent: 6570211 (2003-05-01), He et al.
patent: 6580120 (2003-06-01), Haspeslagh
patent: 6697280 (2004-02-01), Natori
patent: 6743674 (2004-06-01), Wang
patent: 6803620 (2004-10-01), Moriya et al.
patent: 2002/0079533 (2002-06-01), Horiguchi et al.
patent: 2002/0132430 (2002-09-01), Willer et al.
patent: 2003/0015752 (2003-01-01), Palm et al.
patent: 2003/0160280 (2003-08-01), Yoshino
patent: 2003/0185055 (2003-10-01), Yeh et al.
patent: 2003/0230783 (2003-12-01), Willer et al.
patent: 2004/0014280 (2004-01-01), Willer et al.
Johnson, F.S., et al., “Selective Chemical Etching of Polycrystalline SiGe Alloys with Respect to Si and Sio2,” Journal Electron, Materials, vol. 21, No. 8, pp. 805-810, 1992.
Franke A.E., et al., “Polycrystalline Silicon-Germanium Films for Intergrated Microsystems,” Journal of Microelectromechanical Systems, vol. 12, No. 2, Apr. 2003, pp. 160-171.
Lee, S-Y., et al., “A Novel Multibridge-Channel MOSFET (MBCFET): Fabrication Technologies and Characteristics,” IEEE Transactions on Nanotechnology, vol. 2, No. 4, Dec. 2003, pp. 253-257.
Yeh, C.C., et al., “Phines: A Novel Low Power Program/Erase, Small Pitch, 2-Bit per Cell Flash Memory,” 2002 IEEE.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Method for producing semiconductor memory devices and... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for producing semiconductor memory devices and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for producing semiconductor memory devices and... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3578886

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.