Semiconductor device manufacturing: process – Electron emitter manufacture
Reexamination Certificate
2006-04-25
2006-04-25
Coleman, W. David (Department: 2823)
Semiconductor device manufacturing: process
Electron emitter manufacture
C438S038000, C438S704000
Reexamination Certificate
active
07033848
ABSTRACT:
A light emitting device is provided which has a structure for preventing degradation of a light emitting element due to water and oxygen contained in an interlayer insulating film formed between a TFT and the light emitting element. A TFT is formed on a substrate, an inorganic insulating film is formed on the TFT from an inorganic material and serves as a first insulating film, an organic insulating film is formed on the first insulating film from an organic material and serves as a second insulating film, and an inorganic insulating film is formed on the second insulating film from an inorganic material and serves as a third insulating film. Thus obtained is a structure for preventing the second insulating film from releasing moisture and oxygen. In order to avoid defect in forming the film, a portion of the third insulating film where a contact hole is formed is removed alone. Then, a light emitting element composed of an anode, an organic compound layer, and a cathode is formed on the third insulating film. A TFT and a light emitting element in a light emitting device of this application are connected to each other through a wire formed in a contact hole.
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Akimoto Kengo
Murakami Satoshi
Takayama Toru
Coleman W. David
Kim Su C.
Semiconductor Energy Laboratory Co,. Ltd.
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