Semiconductor device including storage capacitor

Details Semiconductor device including storage capacitor Semiconductor device including storage capacitor

2005-11-15

2005-11-15

Nelms, David (Department: 2818)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S301000, C257S303000, C257S306000, C257S310000, C257S311000, C257S762000

Reexamination Certificate

active

06965140

ABSTRACT:
It is an object of the present invention to provide a high-reliability semiconductor device having a storage capacitor and wiring using copper for a main conductive film. Under the above object, the present invention provides a semiconductor device comprising: a semiconductor substrate; a storage capacitor formed on the main surface side of the semiconductor substrate and being a first electrode and a second electrode arranged so as to put a capacitor insulation film; a wiring conductor formed on the main surface side of the semiconductor substrate and including the copper (Cu) element; and a first film formed on the surface of the wiring conductor; wherein a material configuring the first film and a material configuring the first electrode and/or the second electrode include the same element.

REFERENCES:
patent: 4985750 (1991-01-01), Hoshino
patent: 5567964 (1996-10-01), Kashihara et al.
patent: 5717236 (1998-02-01), Shinkawata
patent: 5891513 (1999-04-01), Dubin et al.
patent: 6043526 (2000-03-01), Ochiai
patent: 6072210 (2000-06-01), Choi
patent: 6130449 (2000-10-01), Matsuoka et al.
patent: 6180974 (2001-01-01), Okutoh et al.
patent: 6255151 (2001-07-01), Fukuda et al.
patent: 6255157 (2001-07-01), Hsu et al.
patent: 2002/0011618 (2002-01-01), Ishibashi et al.
patent: 2002/0011818 (2002-01-01), Ishibashi et al.
patent: 2002/0014646 (2002-02-01), Tsu et al.
patent: 2002/0014648 (2002-02-01), Tsu et al.
patent: 2002/0187633 (2002-12-01), Akram
patent: 5-90606 (1993-04-01), None
patent: 6-504408 (1994-05-01), None
patent: 8-69980 (1996-03-01), None
patent: 10-12839 (1998-01-01), None
patent: 10-229084 (1998-08-01), None
patent: 10-270667 (1998-10-01), None
patent: 10-321816 (1998-12-01), None
Nikkei Microdevice (pp. 74-77) Jun. issue in 1992.

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