Semiconductor test device for conducting an operation test...

Error detection/correction and fault detection/recovery – Pulse or data error handling – Digital logic testing

Reexamination Certificate

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C714S724000, C324S765010

Reexamination Certificate

active

06845477

ABSTRACT:
A plurality of test target chips on a test target wafer are simultaneously and electrically coupled to a plurality of chips on a test wafer via a wafer contactor. Each chip on the test wafer has a test circuit for conducting an operation test on each chip on the test target wafer. Since the test circuit is in a one-to-one relationship with respect to the test target chip, and is arranged on the test wafer other than the test target wafer, the many chips can be simultaneously tested in parallel during the wafer test without increasing an area of the test target chips.

REFERENCES:
patent: 5416740 (1995-05-01), Fujita et al.
patent: 6400173 (2002-06-01), Shimizu et al.
patent: 9-89991 (1997-04-01), None
patent: 2726993 (1997-12-01), None
patent: 10-90358 (1998-04-01), None
“Practical Application of Wafer Burn-In Allowing Collective Contact with AI Electrode”, Nikkei Microdevices, Jan. 2000, pp. 148-153.
“Development and Mass-Production of the Wafer-Level CSP as a Product is started”, Nikkei Microdevices, Feb. 1999, pp. 4-5 and 40-67.

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