Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate
2005-03-29
2005-03-29
Fourson, George (Department: 2823)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
On insulating substrate or layer
C438S300000
Reexamination Certificate
active
06872606
ABSTRACT:
A device having a raised segment, and a manufacturing method for same. An SOI wafer is provided having a substrate, an insulating layer disposed over the substrate, and a layer of semiconductor material disposed over the insulating layer. The semiconductor material is patterned to form a mesa structure. The wafer is annealed to form a raised segment on the mesa structure.
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Chen Hao-Yu
Hu Chenming
Yang Fu-Liang
Yeo Yee-Chia
Fourson George
Slater & Matsil L.L.P.
Taiwan Semiconductor Manufacturing Company , Ltd.
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