Method of producing semiconductor device

Details Method of producing semiconductor device Method of producing semiconductor device

2005-05-17

2005-05-17

Whitehead, Jr., Carl (Department: 2813)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C117S104000

Reexamination Certificate

active

06893965

ABSTRACT:
A method of producing a semiconductor device in which a film is formed on a substrate by a chemical vapor deposition (CVD) process, the method comprising purifying a source gas for a film to be formed by selectively removing at least one of components contained in the source gas, which does not pertain to reactions for the deposition of the film, based on the difference in molecular size between the component to be removed and other components.

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